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17bfd26b39cd 13.37GB 3 years ago . /3274988-anylogic-720-professional-all-versions-serial-keygen-promast.html
I'm new to Ubuntu.
Can someone help me?
A:
Most likely, it's a cron job. Just log in as root and look in /etc/cron.daily to see if there's anything left there. If so, start it up manually.
If there's nothing there, you can just add the cron job yourself. Log in as root and run sudo crontab -e and add the command you want to run every day at midnight to the end of the file.
1. Field of the Invention
The present invention relates to a beam spot forming optical system which forms a beam spot on a target, such as a wafer or a mask, for the purpose of exposure or the like. The present invention also relates to a scanning exposure apparatus which uses this beam spot forming optical system.
2. Related Background Art
The conventional scanning exposure apparatus which forms a latent image of a circuit pattern on the target by scanning a beam spot on the target with the exposure beam has the following configuration. The light from a light source is split by a half mirror and is projected through a lens and a diaphragm onto a mask. The mask is scanned in a sub scanning direction while the mask and the lens are moved in a main scanning direction. The pattern of the mask is scanned with the exposure beam, and the latent image of the pattern is formed on the target. In the conventional scanning exposure apparatus, a single beam from the light source is split, and the beam spot is formed on the target with the single beam.
With the conventional scanning exposure apparatus, however, when the beam spot formed on the target with the single beam is transferred to the target, its diameter increases in the main scanning direction and decreases in the sub scanning direction. When the beam spot is transferred to the target, its diameter is constant in the main scanning direction, but its diameter is not constant in the sub scanning direction, because the configuration of the apparatus limits the sub scanning direction.
For example, when the diameter of the beam spot in the sub scanning direction is reduced in order to reduce the spot size, the spot position in the main scanning direction becomes far away from the pattern
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